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Non-destructive Depth Profiling of the Activated Ti-Zr-V Getter by Means of Excitation Energy Resolved Photoelectron Spectroscopy
Non-destructive Depth Profiling the Activated Ti-Zr-V Getter Excitation Energy Resolved Photoelectron Spectroscopy
2010/9/17
Non-evaporable Ti-Zr-V ternary getters (NEGs) were studied by means of excitation energy resolved photoelectron spectroscopy (ERXPS). We attempted a quantitative study of the in-depth redistribution o...